应用领域 / 半导体

半导体

晶圆搬运、掩模台、检测光学、光刻定位。亚纳米重复精度、真空兼容和零磁场辐射是不可妥协的要求。

01

Sub-nm wafer stage positioning

Motor selection for 300mm platforms

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02

Reticle handling in EUV lithography

Why every micron of vibration costs yield

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03

Vacuum-compatible motor selection for process chambers

Outgassing, lubricants, and SEMI standard compliance

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04

Autofocus in optical inspection

Speed-resolution tradeoffs in piezo-driven lens stages

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