工程工具

真空兼容性检查器

评估组件在真空/洁净室环境中的兼容性。

环境要求

Turbo/diffusion pumped systems

Effective speed at chamber, not pump rated speed.


电机配置

Standard HR motor. Suitable for HV with careful cleaning. Not recommended for UHV without modification.

PFPE vacuum grease (e.g., Fomblin, Krytox). Low outgassing but still generates some vapor.

Excellent vacuum compatibility. Low outgassing, high temperature tolerance. Standard choice for UHV systems.

Exposed linear encoder, standard version. Adhesive mounting may limit vacuum depth.